Silicon Capacitive Sensors for Biomedical Applications

CASE - CP96-136

Keywords: microelectronics, reliability, capacitive sensors, lower power consumption, high pressure sensitivity, medical applications

Start Date: open / Duration: 18 months

[ participants / contact]

Objectivies and Approach

The CASE project aims at transferring recent research results on capacitive sensors developed within European research projects from research institutes, namely CNM and IMEL, to an industrial Central European partner (Romes S.A.). This company is very experienced with microelectronics processes and devices and is fully equipped to process silicon wafers. Characterisation and reliability issues of the transferred technologies will be studied by the ICCE which is in close contact with Romes S.A. The Warsaw University of Technology will mainly focus on device characterisation.

Recent research has shown that capacitive-type devices perform better than piezoresistive ones on issues such as low power consumption and high pressure sensitivity. The above qualifications make these devices very attractive for medical applications. A demonstration project is a good opportunity to start up this activity in Eastern Europe with an important social impact and with relatively low cost, since the fabrication infrastructure is already there.



EU Partners


Non-EU Partners

Institute for Electronic Components (ICCE), RO
Romes S.A., RO
Technical University, Warsaw, PL


Mr. Dimitris Tsoukalas
Tel: +30 1 653 3781
Fax: +30 1 651 1723

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CASE - CP96-136, May 1997

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html version of synopsis by Nick Cook