Investigation of Porous Si-Based Structures for Integrated Gas Sensing Applications

PORSIS - CP94-963

Keywords: porous silicon, gas sensor arrays, neural networks, BiCMOS

Start Date: 1 January 95 / Duration: 36 months

[ participants / contact]

Objectivies and Approach

The project aims at the development of porous silicon layers for use in gas sensor arrays, the BiCMOS-compatible fabrication of these layers and the implementation in a BiCMOS process of a neural network.

The approach will be:

The gas transport phenomena determining the behaviour of gas sensor systems will be described with mathematical models, from which a simulation of the system's performance under static and dynamic conditions will be made. The gas sensing system will be integrated in a Micro Total Analysis System (µTAS) for gases.

Progress and Results

The deposition of selective layers onto the porous silicon has been studied in order to obtain a higher selectivity. Alternatively, a neural network will be designed, implemented and combined with the gas sensor array to further increase the recognition capability of the system.

Information Dissemination Activities and/or Exploitation

Results obtained from the project have been presented at conferences and published in scientific journals. One or more informal workshops will be organised during the project.


MESA Research Institute - University of Twente
P.O. Box 217
NL-7500 AE Enschede, NL

EU Partners

MESA Research Institute - University of Twente, NL
Helsinki University of Technology, SF

Non-EU Partners

ATKI, Budapest, HU
WESZTA-T, Budapest, HU
Institute of Microtechnology, Bucharest, RO
University of Sofia, BG


Dr. A. van den Berg
Tel: +31 53 89 26 91
Fax: +31 53 30 95 47

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PORSIS - CP94-963, May 1997

please address enquiries to the ESPRIT Information Desk

html version of synopsis by Nick Cook