Investigation of Porous Si-Based Structures for Integrated Gas Sensing Applications

PORSIS - CP94-963

Keywords: porous silicon, gas sensor arrays, neural networks, BiCMOS

Start Date: 1 January 95 / Duration: 36 months

Objectivies and Approach

The project aims at the development of porous silicon layers for use in gas sensor arrays, the BiCMOS-compatible fabrication of these layers and the implementation in a BiCMOS process of a neural network.

The approach will be:

to examine different techniques (such as evaporation, atomic layer epitaxy (ALE), molecular beam epitaxy (MBE) and refined sol-gel) to deposit selective layers onto the porous silicon,
to determine, simulate and integrate the optimal neural network for use in conjunction with gas sensor arrays to enhance their selectivity.

The gas transport phenomena determining the behaviour of gas sensor systems will be described with mathematical models, from which a simulation of the system's performance under static and dynamic conditions will be made. The gas sensing system will be integrated in a Micro Total Analysis System (µTAS) for gases.

Progress and Results

The deposition of selective layers onto the porous silicon has been studied in order to obtain a higher selectivity. Alternatively, a neural network will be designed, implemented and combined with the gas sensor array to further increase the recognition capability of the system.

Information Dissemination Activities and/or Exploitation

Results obtained from the project have been presented at conferences and published in scientific journals. One or more informal workshops will be organised during the project.

Coordinator

MESA Research Institute - University of Twente
P.O. Box 217
NL-7500 AE Enschede, NL

EU Partners

MESA Research Institute - University of Twente, NL
Helsinki University of Technology, SF

Non-EU Partners

ATKI, Budapest, HU
WESZTA-T, Budapest, HU
Institute of Microtechnology, Bucharest, RO
University of Sofia, BG

CONTACT POINT

Dr. A. van den Berg
Tel: +31 53 89 26 91
Fax: +31 53 30 95 47
E-mail: A.vandenBerg@el.utwente.nl

PORSIS - CP94-963, May 1997

please address enquiries to the ESPRIT Information Desk

html version of synopsis by Nick Cook