Keywords: porous silicon, gas sensor arrays, neural networks, BiCMOS
Start Date: 1 January 95 / Duration: 36 months
[ participants / contact]
The project aims at the development of porous silicon layers for use in gas sensor arrays, the BiCMOS-compatible fabrication of these layers and the implementation in a BiCMOS process of a neural network.
The approach will be:
The gas transport phenomena determining the behaviour of gas sensor systems will be described with mathematical models, from which a simulation of the system's performance under static and dynamic conditions will be made. The gas sensing system will be integrated in a Micro Total Analysis System (µTAS) for gases.
The deposition of selective layers onto the porous silicon has been studied in order to obtain a higher selectivity. Alternatively, a neural network will be designed, implemented and combined with the gas sensor array to further increase the recognition capability of the system.
Results obtained from the project have been presented at conferences and published in scientific journals. One or more informal workshops will be organised during the project.
MESA Research Institute - University of Twente
P.O. Box 217
NL-7500 AE Enschede, NL
MESA Research Institute - University of Twente, NL
Helsinki University of Technology, SF
ATKI, Budapest, HU
WESZTA-T, Budapest, HU
Institute of Microtechnology, Bucharest, RO
University of Sofia, BG
Dr. A. van den Berg
Tel: +31 53 89 26 91
Fax: +31 53 30 95 47
PORSIS - CP94-963, May 1997
please address enquiries to the ESPRIT Information Desk
html version of synopsis by Nick Cook