Basic Research for Microsystems Integration


BARMINT - 8173

Work Area: New Concepts for Top-Down Microsystem Design and the Simulation of Microsystem Performance

Keywords microtechnology, microsystem, multichip multifunctional integrated modules


Start Date: to be announced / Status: starting

[ participants / contact ]


Abstract BARMINT aims to identify and develop the methods, tools and technologies necessary for designing and fabricating silicon based microsystems in monolithic and multichip conditioning. A common demonstrator associating optical, mechanical and chemical functionalities will cluster the problems that are likely to be encountered in future industrial microsystems. It will thereby be used to propose solutions to the technological bottle-necks in compatibility and to develop basic methodologies for top-down microsystem design.


Aims

BARMINT aims to design and integrate different functions (sensing, actuating, signal processing) using collective fabrication processes on silicon mono-substrates or using silicon multichip modules, so as to arrive at generic, low cost, efficient, complete microsystems.

Approach and Methods

To attain these goals, a "common demonstrator for compatibility studies" has been defined which combines all the difficulties already identified in microsystem design and fabrication:

Potential

Practical benefits in three sectors are anticipated:


Coordinator

LAAS/CNRS - F
7, avenue du Colonel Roche
F- 31077 Toulouse Cedex

Partners

Universität Karlsruhe - D
Technische Hochschule Darmstadt - D
Centro National de Microelectronica - E
Universitat de Barcelona - E
Institut National Polytechnique de Grenoble - F
National Microelectronics Research Center - IRL

CONTACT POINT

Dr. E. Esteve
tel +33/61 521919
fax +33/61 336208


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BARMINT - 8173, August 1994


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html version of synopsis by Nick Cook