Advanced Pellicle Technology Development for Advanced High-Density and ASIC Devices


APT - 7284

Keywords pellicle manufacturing, masks, reticles


Start Date: 15-OCT-92 / Duration: 36 months

[ contact / participants ]


Objectives

The APT project addresses key areas of the materials and manufacturing technology of pellicles to ensure that a commercially advanced and competitive source is available to the European Community. APT builds on the work of ESPRIT project 5014 and the JESSI T8 project.

The work concentrates on the following key areas:

Pellicles developed in this project will find applications in the new generation of wafer-steppers and phase-shifted masks.

Progress and Results

Methods for the filtration of polymer mixes have been investigated as well as the cleaning of mix containers. Controls using polymer viscosity as well as alternative polymer systems are also under investigation. Improved pellicle packaging and handling issues are being examined, as well as consideration of the frame material. The design of prototype equipment for future production systems is also being studied.


CONTACT POINT

Dr Terrence Croucher
Polymer Laboratories Ltd
Essex Road
Church Stretton
UK - Shropshire SY6 6AX
tel: + 44 / 694-723-581
fax: + 44 / 694-722-171
telex: 35621

Participants

POLYMER LABORATORIES LTD - UK - C
SEMILAB LTD - UK - P
MIETEC NV - B - P
IMEC VZW - B - P


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APT - 7284, December 1993


please address enquiries to the ESPRIT Information Desk

html version of synopsis by Nick Cook