Keywords pellicle manufacturing, masks, reticles
Start Date: 15-OCT-92 / Duration: 36 months
[ contact / participants ]
The APT project addresses key areas of the materials and manufacturing technology of pellicles to ensure that a commercially advanced and competitive source is available to the European Community. APT builds on the work of ESPRIT project 5014 and the JESSI T8 project.
The work concentrates on the following key areas:
Pellicles developed in this project will find applications in the new generation of wafer-steppers and phase-shifted masks.
Methods for the filtration of polymer mixes have been investigated as well as the cleaning of mix containers. Controls using polymer viscosity as well as alternative polymer systems are also under investigation. Improved pellicle packaging and handling issues are being examined, as well as consideration of the frame material. The design of prototype equipment for future production systems is also being studied.
Dr Terrence Croucher
Polymer Laboratories Ltd
UK - Shropshire SY6 6AX
tel: + 44 / 694-723-581
fax: + 44 / 694-722-171
POLYMER LABORATORIES LTD - UK - C
SEMILAB LTD - UK - P
MIETEC NV - B - P
IMEC VZW - B - P
APT - 7284, December 1993
please address enquiries to the ESPRIT Information Desk
html version of synopsis by Nick Cook