Improved i-Line Steppers


ASPRO - 6793

Keywords i-line steppers, 0.4 micron structures, lithography


Start Date: 27-MAY-92 / Duration: 30 months

[ contact / participants ]


Objectives

The objective of ASPRO is to develop and qualify a high-throughput optical wafer-stepper with a resolution of 0.4 micron that can be used in the manufacturing processes of a wide range of silicon devices, ranging from high-volume memories to low-volume ASICs. By the mid-1990s the design rules for advanced device production will very likely be based on feature sizes of 0.5 to 0.35 microns, and the lithographic production capability resulting from this project will be essential for the effective exploitation of ESPRIT silicon technology developments.

The targeted for characteristics of the new stepper are:

Substantial user involvement is the key factor in successfully developing and applying advanced wafer fabrication equipment, and the new wafer-stepper will be evaluated under pilot production conditions at Centre Commun CNET SGS-Thomson, with the active participation of IBM and Philips. The wide range of different products manufactured by these partners will help the equipment manufacturer adapt the stepper for various roles. An equipment improvement and contamination reduction programme will be set up to facilitate this process.

Progress and Results

The prototype stepper PAS 5500/100 has been built with the variable NA lens and variable coherence, aimed at the 0.35 micron semiconductor market. It has been fully characterised and is now commercially available. Ten steppers are planned for 1993, based on customer commitments. Improvements in illuminator efficiency and filter transmission have lead to higher stepper throughput as well as longer component lifetime.


CONTACT POINT

F. D'Hoore
ASM-Lithography BV
De Run 1110
NL - 5503 LA Veldhoven
tel: + 31/ 40-580-328
fax: + 31/ 40-580-709
telex: 59165 ASMLI NL

Participants

ASM-LITHOGRAPHY BV - NL - C
FRAUNHOFER AIS - D - P
PHILIPS INTERNATIONAL BV - NL - P
CARL ZEISS - D - P
IBM FRANCE - F - P
CENTRE NATIONAL D'ETUDES
DES TELECOMMUNICATIONS - F - P


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ASPRO - 6793, December 1993


please address enquiries to the ESPRIT Information Desk

html version of synopsis by Nick Cook