Beyond 0.3 micron Optical Lithography Development


BOLD - 6792

Keywords lithography, DUV steppers, microlithography lenses, sub-0.3 micron structures


Start Date: 15-MAY-92 / Duration: 36 months

[ contact / participants ]


Objectives

The objectives of BOLD are to build and test two lithographic systems that will enable the evaluation of high numerical aperture (NA) optics and scan-and-repeat technology with a resolution in the sub-0.3 micron range. Projection systems with very high NA at short wavelengths will be designed and a prototype lens system built. The possibilities of scan-and-repeat and other photocomposition methods will be investigated, with the emphasis placed on accommodating large chip sizes for future ASIC devices. The most critical subsystems (high-precision synchronised wafer and reticle stages) will be built and tested in a laboratory system. System requirements will be provided by a user group, and the resolution and overlay of the new techniques evaluated.

Progress and Results

A prototype wafer stage with high accuracy and high speed based on novel principles has been realised. A new motor concept has been introduced and is being evaluated, as are new alignment and interferometry systems. The basic design and technology for the step and scan lens have been established, and the effects of a finite laser bandwidth on the lens performance have been calculated. Market requirements for 0.25 micron scanning systems have been considered, and based on this a system outline for a production step and scan system has been drawn up. Simulation is being used to study the effects of the source and illumination characteristics on the overall performance. User inputs are continuously refined and updated, and are considered in the overall planning.


CONTACT POINT

Dr Stefan Wittekoek
ASM-Lithography BV
De Run 1110
NL - 5503 LA Veldhoven
tel: + 31/ 40 580310
fax: + 31/ 40 580709
telex: 59165 ASMLI NL

Participants

ASM-LITHOGRAPHY BV - NL - C
CEA-LETI - F - P
IBM DEUTSCHLAND GMBH - D - P
IMEC VZW - B - P
CARL ZEISS - D - P
FRAUNHOFER IMT - D - P
CENTRE NATIONAL D'ETUDES
DE TELECOMMUNICATIONS - F - A


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BOLD - 6792, December 1993


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html version of synopsis by Nick Cook