Multi-Axial Monolithic Integrated Accelerometer


MAXIMA - 6416

Keywords monolithic integrated smart sensors (MISS), accelerometers, automotive applications


Start Date: 01-APR-92 / Duration: 36 months

[ contact / participants ]


Objectives

Sensors such as accelerometers are important components in the automotive industry. To compete on the world market, a new class of sensors is required with better performance, reliability, system (bus) compatibility, interchangeability, and at lower cost levels.

The main objectives of MAXIMA are to:

Silicon-based sensors using micromachining technologies to create the sensor function are the most promising candidates to fulfil these requirements. Monolithic integration with microelectronic circuits creates a unique possibility to achieve an improved quality of sensor systems. A demonstrator 3-D accelerometer will be fabricated and tested in the automotive environment. Applications are expected in four major areas: air-bag and safety restraint systems; adaptive and active suspension systems; braking and tracking control; and navigation and guidance.

Progress and Results

Processes for the deposition and wet etching of various oxides as the sacrificial layer and for deposition and dry etching of polysilicon from 1 micron up to 10 micron thickness have been developed. Relevant parameters for sensor designs have been determined with specially designed test structures and equipment. Two different process flows for the integration of the sensors into a BiCMOS process have been developed, and 24 different capacitive structures for x, y and z measurment designed. Fabrication with subsets of the integrated process flows has been started. Three different approaches for sensor signal detection and force-feedback have been investigated in detail. The design of circuits based on the chosen concept has started (a circuit for online testing and offline correction of the sensors already exists at the breadboard stage).


CONTACT POINT

Dr W. Riethmüller
Fraunhofer-IMT
Dillenburgerstr. 53
D - 1000 Berlin
tel: + 49 / 30-829-98-310
fax: + 49 / 30-829-98-199
telex: 184821

Participants

FRAUNHOFER IMT - D - C
ROBERT BOSCH GMBH - D - P
AMBIT - GR - P
UNIVERSIDAD POLITECNICA
DE CATALUÑA - E - P
UNIVERSITY OF UPPSALA - S - P
CENTRO NACIONAL DE
MICROELECTRONICA - E - P
SOCIEDAD ESPAÑOLA DE AUTOMOVILES
DE TURISMO - E - A


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MAXIMA - 6416, December 1993


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html version of synopsis by Nick Cook