IC Multistep Process Diagnosis


IMPROD - 6200

Keywords statistical process control, quality control, testing


Start Date: 01-APR-92 / Duration: 24 months

[ contact / participants ]


Objectives

The main aim of the IMPROD project is to insert enhanced statistical methods and processing control tools into the current IC manufacturing environment of two semiconductor manufacturing companies (SGS-Thomson and Bosch) in order to substantially increase process and product quality. The project will add the following to current process and device engineering capabilities:

The improved system will be used for quality control in the production of automotive products at the two semiconductor manufacturers.

Bench-mark testing for the new system will be performed against the existing factory systems (which involve control by attributes rather than by variables) to demonstrate improved product quality. The goal is to improve this up to the level of equivalent Japanese products.

Progress and Results

The first release of a test and parametric data management package was installed in an IC manufacturing line, including the ability to automatically generate Cpk values for process steps. An initial set of tools for engineering analysis has been implemented.

Examination of the process methods employed in microelectronic manufacturing has resulted in a proposed statistical methodology using multivariate analysis to detect relationships and dependencies in the production parameters, and a methodology is defined which will automatically detected unwanted variation. Modeling of test structures has produced optimum new designs to be used on the semiconductor wafers so that essential process parameters can be extracted from the wafer.

The choice of data management methods, statistical analysis tools and selection of database format have been greatly assisted by the commercial software partner in the project. The tools developed in the project are designed to be able to draw data from a variety of database systems.


CONTACT POINT

Dr Paolo Confalonieri
Consorzio Milano Ricerche
Via Cicognaria 7
I - 20129 Milano
tel: + 39 / 2-733-062
fax: + 39 / 2-738-5567

Participants

CONSORZIO MILANO RICERCHE - I - C
ROBERT BOSCH GMBH - D - P
TXT INGEGNERIA INFORMATICA - I - P
SGS-THOMSON MICROELECTRONICS SRL - I - P
CMSU - GR - A
QUEEN'S UNIVERSITY BELFAST - UK - A


TCS synopses home page TCS acronym index TCS number index
All synopses home page all acronyms index all numbers index

IMPROD - 6200, December 1993


please address enquiries to the ESPRIT Information Desk

html version of synopsis by Nick Cook