Ferroelectric Layers for Memory Applications and Sensors


FELMAS - 6137

Keywords ferroelectrics, non-volatile memory


Start Date: 12-MAY-92 / Duration: 24 months

[ contact / participants ]


Objectives

Ferroelectric compounds such as the lead zirconate titanates (PbZr[x]Ti[1x]O[3], or PZT) exhibit a range of physical properties of interest for different applications. In particular, they are characterised by a permanent, electrically switchable dielectric polarisation, which makes ferroelectric capacitors suitable for binary, non-volatile data storage.

The objective of FELMAS is to demonstrate the feasibility of making high-quality PZT films of sufficient quality for non-volatile memory devices and to integrate them with existing CMOS technologies. Specific aims are to:

Progress and Results

The development of the ferroelectric technology has been largely completed. Capacitors with a film thickness between 0.1 and 0.4 µm have been deposited on 10 cm oxidised silicon wafers. They can be switched for more than 10{10} cycles at 5 V and even for more than 10{15} cycles at 1.5 V. This is very promising for future low-voltage (battery operated) applications.

On the process development side, it has been shown that the structuring of the capacitors can be successfully bone by dry-etching techniques such as reactive ion etching. This is indeed an important result because it enables production of high-density memories and enhances the compatibility with silicon IC processes.

Considerable effort has been expended on the design of a TSEM, containing a number of CMOS and ferroelectric test structures, sensor structures, different memory cells and a small (256-bit) memory. The design is now complete and the production of the TSEM will take place in the remaining period of the project.


CONTACT POINT

Dr Poul K. Larsen
NEDERLANDSE PHILIPS BEDRIJVEN BV
Philips Research Laboratories
Prof. Holstlaan 4
NL - 5600 JA EINDHOVEN
tel: + 31/ 40-74 33 78
fax: + 31/ 40-44 33 65
telex: 35000 PHTC NL

Participants

NEDERLANDSE PHILIPS BEDRIJVEN BV - NL - C
CEA-LETI - F - P
ECOLE POLYTECHNIQUE FEDERALE
DE LAUSANNE - CH - P
THOMSON-CSF SA - F - P
MARCONI ELECTRONIC DEVICES LTD - UK - P
IMEC VZW - B - A
THOMSON COMPOSANTS MILITAIRES
ET SPACIAUX - F - A


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FELMAS - 6137, December 1993


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