Multiwafer Planetary MOVPE Reactor


PLANET - 5003

Keywords MOVPE equipment, III-V materials, optoelectronics


Start Date: 01-JAN-90 / Duration: 36 months

[ contact / participants ]


Objectives and Approach

The goal of the PLANET project was to develop high throughput, multiwafer MOVPE (metal-organic vapour phase epitaxy) equipment suitable for the realisation of complex III-V heterostructure materials for electronic and optoelectronic devices and circuits. Applications for these devices lie in the field of high-speed signal processing, high-frequency satellite broadcasting, and semiconductor laser-related information transmission and storage.

The project consisted of the development and improvement of a reactor prototype by an experienced MOVPE equipment manufacturer, tests of the design, and its application to various types of III-V materials, including In- and P-containing compounds. AlGaAs FETs and lasers were made for qualification of the PLANET reactor for these applications. In the second phase, a similar approach was taken towards improved InGaAs transistors and visible lasers made of InGaAlP. Throughout the project, epitaxy, characterisation and device research supported the equipment development work, and reactor modelling supported reactor optimisation.

Progress and Results

The following results have been achieved:

Exploitation

Pilot production of AlGaAs lasers for both low and high-power applications has been initiated. Philips Microwave Limeil has decided in 1992 to base its pseudomorphic HEMT MMIC product line on PLANET material as first supplier. The software for simulation of chemical vapour deposition reactors is commercially available, and there is widespread interest in the commercially available PLANET MOVPE reactors.


CONTACT POINT

Prof. Dr. G.A. Acket
PHILIPS Optoelectronics Centre
PO Box 80 000
NL - 5600 JA Eindhoven
tel: + 31/ 40-7429993
fax: + 31/ 40-743859

Participants

PHILIPS-LEP - F - C
AIXTRON - D - P
POLYFLOW SA - B - P
NEDERLANDSE PHILIPS BEDRIJVEN BV - NL - P
TELEFONICA INVESTIGACION
Y DESARROLLO - E - P
UNIVERSIDAD POLITECNICA DE MADRID - E - A


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PLANET - 5003, December 1993


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html version of synopsis by Nick Cook